| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact having both of high toughness and high thermal conductivity. SOLUTION: This aluminum nitride sintered compact has an intergranular phase of an acicular or columnar structure of a rare earth-aluminum-oxygen compd. As for the rare earth elements, yttrium can be used. The sintered body is obtd. by mixing rare earth oxides in aluminum nitride powder, sintering the mixture and cooling the sintered body at the cooling rate of <10 deg.C/min. |
