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发明名称
Wafer release method and apparatus
摘要
申请公布号
EP0615281(B1)
申请公布日期
2000.10.25
申请号
EP19940301606
申请日期
1994.03.08
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
BLAKE, JULIAN G.;TU, WEILIN
分类号
H01L21/265;B23Q3/15;G01R27/26;H01L21/683;(IPC1-7):H01L21/00
主分类号
H01L21/265
代理机构
代理人
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