| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater capable of providing extremely uniform heating. SOLUTION: In this manufacturing method, metallic paste 6 for an electrothermal circuit is coated on one surface of a substrate 1 formed of aluminum nitride sintered product provided by liquid phase sintering, and is dried. Aluminum nitride paste 7 for a cover added a low temperature sintering assist is coated on a residual part of the one surface, and is dried. Then the same paste 8 as the aluminum nitride paste is coated thereon, and is dried. After a certain time, it is baked at 1500-1800 deg.C.
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