发明名称 EQUIPMENT AND METHOD FOR DEVICE MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To reduce the number of times of changes of parameters by an operator by a method wherein information in the other parameters relating to the newly added parameters is stored, and the related information is analyzed to reflect the analysis results automatically. SOLUTION: A convert processing is performed between an existing database and a new database at the time of version-up. It is judged whether or not there are newly added parameters in the existing database (S1). When YES with reference to related information of a parameter table of the newly added parameters, it is judged whether or not there is related information (S2). When YES a type of related information is discriminated, and contents written as conditions are analyzed, and the results are acquired (S4). The acquired data are registered in the database as initial values of the parameter table automatically (S6). The analysis results is reflected.
申请公布号 JP2000294475(A) 申请公布日期 2000.10.20
申请号 JP19990096882 申请日期 1999.04.02
申请人 CANON INC 发明人 HIROSE MASUHISA
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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