发明名称 SEMICONDUCTOR ELEMENT-CONNECTING APPARATUS, SEMICONDUCTOR ELEMENT-INSPECTING APPARATUS AND INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor element-connecting apparatus which can accurately connect even fine and high-density semiconductor element electrodes to an electric inspection apparatus (jig) or the like, thus permitting efficient inspection for semiconductor elements, and which is free from the abnormal deformation of the conductive part of an anisotropic conductive sheet even when repeatedly used, has a superior durability and can be stably used for a long time. SOLUTION: The electric connecting apparatus for semiconductor elements with projecting electrodes has a connecting part 3 to which the projecting electrodes are electrically connected, and an anisotropic conductive elastic body with conductive parts 4a set to an area connected to the connecting part 3 and separated from a position corresponding to the projecting electrodes.
申请公布号 JP2000292484(A) 申请公布日期 2000.10.20
申请号 JP19990104624 申请日期 1999.04.12
申请人 JSR CORP 发明人 INOUE KAZUO
分类号 H01L23/12;G01R1/073;G01R31/26;H01L21/60;H01L21/66;H01L21/68;(IPC1-7):G01R31/26 主分类号 H01L23/12
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