| 摘要 |
PROBLEM TO BE SOLVED: To reduce the height f a rotary member without deteriorating the performance and to reduce the occupancy region. SOLUTION: As to this sputtering device, in a sputtering device having a magnet rotating mechanism arranged at the back face side of a target in a vacuum vessel and for generating the magnetic flux, a driving motor 31, a rotary member 33 combining a speed reducing performance and connected to the driving motor 31 and a magnet 38 fitted to the rotary member 33 via a magnet fitting board 39 are provided, and, the rotary member 33 is composed of a ring-shaped gear 34 fitted to the magnet fitting board 39, and in which the engaging part is formed at the inside face and a pinion 35 engaged with the engaging part of the gear 34 and furthermore connected with the output shaft 32.
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