| 摘要 |
PROBLEM TO BE SOLVED: To reduce remaining vibrations after a stage is driven, by calculating the center of gravity of the combination of a first table and a second table from the detected center of gravity of the first table and the previously measured center of gravity of the second table and driving the calculated center of gravity by a second drive mechanism. SOLUTION: The x-axis slider 14 of a first table 12 is fixed, and the tip of its y-axis slider 14 is engaged with a y-axis drive guide 15 and is freely moved in the x-axis direction. The y-axis drive guide 15 is fixed to a first drive mechanism 13 controlled by a control mechanism 26. The center of gravity G1 of the first table 12 is detected and the center of gravity of the combination of the first table 12 and a second table 17 in the y-axis direction is calculated. An x-axis drive connecting part 21 is moved to the calculated center of gravity and an x-axis is driven by a second drive mechanism 18.
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