| 摘要 |
PURPOSE: An apparatus for adjusting a temperature of a coolant for a semiconductor fabricating equipment is to minimize a power consumption of a cooling device for cooling a semiconductor substrate. CONSTITUTION: An apparatus for adjusting a temperature of a coolant for a semiconductor fabricating equipment comprises a coolant bath(30) for storing a coolant supplied to a chamber(1), a pump(31) for supplying the coolant from the coolant bath to the chamber, a thermoelectric module(32) disposed at an intake pipe(25) to cool the coolant supplied to the chamber, a heat exchanger disposed at a discharging pipe(9), a first temperature sensor(33) disposed at the intake pipe to detect the coolant supplied to the chamber, a second temperature sensor disposed at the discharging pipe to detect the discharged coolant, a first valve(34) disposed at a first supplying pipe(40) to control an amount of a process cooling water supplied to the thermoelectric module, and a second valve disposed at a second supplying pipe to control an amount of the process cooling water supplied to the heat exchanger, and a controller for controlling the first and second valves.
|
