| 摘要 |
<p>PURPOSE:To provide a durable scrubber which leaves no uncleaned portion or causes no scratch in cleaning a rectangular substrate. CONSTITUTION:A scrubber 3 for cleaning a substrate having a roll 1 provided with cloth 21 and a brush 22. The scrubber 3 cleans an almost rectangular substrate 4 rotating on the axis of the central normal perpendicular to the axis of the roll 1 by contacting the cloth 21 and the brush 22 with the substrate 4. The cloth 21 is implanted in a portion of the roll 1 to be put into contact with the area within the inscribed circle to the substrate 4; the brush 22 is implanted in a portion of the roll 1 to be put into contact with the area outside the inscribed circle to the substrate 4.</p> |
