| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high-precision and inexpensive displacement sensor. SOLUTION: Stationary elements 20, 21 comprising magnetic material are arranged oppositely with a centered moving element 1 comprising magnetic material. The stationary elements 20, 21 are equipped with driving coils DL0, DL1 and detecting coils SL0, SL1 corresponding to them, respectively. A control part gives pulse driving to the driving coils DL0, DL1 with an electric power corresponding to the intervals d0, d1 between the moving element 1 and the stationary elements 20, 21, so that the moving element 1 is balanced on the middle position of the stationary elements 20, 21, based on detection outputs of the detecting coils SL0, SL1. Then, the numbers of the driving pulses of each driving coil DL0, DL1 are counted to calculate a force or an acceleration added to the moving element 1 by the counted values. |
