发明名称 ULTRASONIC DRYER
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic dryer that can easily and securely dry liquid adhering to a thin film section. SOLUTION: A tip surface 10 is an ultrasonic radiation surface for radiating an ultrasonic wave, a standing wave is formed between the tip surface 10 and an ultrasonic-wave reflector 14, and a position that becomes the node of sound pressure is formed at specific intervals. Since a lead frame 1 moves while being inclined to the tip surface 10 and the ultrasonic-wave reflector 14 by an angle θ, a position that becomes the node of a sound pressure is allowed to coincide with at least one place on the lead frame 1, thus eliminating the need for accurately positioning the lead frame 1 to the position that becomes the node of the sound pressure between the ultrasonic-wave reflector 14 and the tip surface 10 as compared with a case where the lead frame 1 is arranged in parallel with the tip surface 10 and the ultrasonic-wave reflector 14.
申请公布号 JP2000258055(A) 申请公布日期 2000.09.22
申请号 JP19990061280 申请日期 1999.03.09
申请人 KAIJO CORP 发明人 NAKAJIMA NORIHIKO
分类号 B06B1/06;F26B5/02;F26B13/24;H01L23/50;H02N2/00 主分类号 B06B1/06
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