PREPARATION OF OXIDE FILM USING ALKYL HETEROMETAL ALKOXIDE OF LI AND 13 GROUP METAL

摘要

PURPOSE: A method for preparing a composite oxide of lithium and 13th group metal is provided which economically and simply provides LiMO2 type composite oxide film under low pressure. CONSTITUTION: The LiMO2 type composite oxide film of lithium and 13th group metal is prepared by contacting a vapor state alkylic acid alkyl hetero metal compound of lithium and 13th group metal represented by the following formula (I): LiOR'·(R'O)MR2 with a substrate. In the formula (I), M is aluminum or gallium, and each R and R' is a C1-10 alkyl group.