SPEED OF ROTATION SENSOR

摘要

PURPOSE: A speed of rotation sensor is provided which can be produced with good operating characteristics in surface micromechanics in the framework of a VLSI-compatible production process. CONSTITUTION: A speed of rotation sensor is a micromechanical silicon component. A ring with a stiff strut (11) is suspended by elastic braces (10) and anchors(9) on a substrate in such a way that it can oscillate around its central axis and be tilted around the strut when outer torques are applied. Electric voltages can be applied to electrodes located on the ring and substrate to make the ring oscillate around its central axis and to detect oscillations around the strut. Additional electrodes may be provided on the ring and substrate to generate electrostatic forces and hence to stabilize the ring in its rest position.