Positive resist composition,申请号EP19930109004-传众专利搜索

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发明名称	Positive resist composition
摘要
申请公布号	EP0573056(B1)	申请公布日期	2000.09.13
申请号	EP19930109004	申请日期	1993.06.04
申请人	SUMITOMO CHEMICAL COMPANY LIMITED	发明人	UETANI, YASUNORI;TOMIOKA, JUN;NAKANISHI, HIROTOSHI
分类号	G03F7/022;H01L21/027;(IPC1-7):G03F7/022	主分类号	G03F7/022
代理机构		代理人
主权项
地址

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