| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump operation control method capable of saving energy through reduction of a consumption of refrigerant gas and reducing an operation cost. SOLUTION: In a method for controlling operation of a cryopump 10, a first heater and a first temperature sensor are arranged at a first stage cooling part, a second heater and a second temperature sensor are mounted on a second stage cooling part, the temperatures of the first and second stage cooling parts are measured by respective temperature sensors, and on the basis of a difference between a measurement temperature and a set temperature set according to the kind of feed gas supplied to the cryopump 10, the respective heaters are operated by a cryopump controller 32 and a control box 31 to control the temperature of the respective cooling parts. Since the cooling parts are not cooled more than necessary, the consumption of refrigerant gas is reduced, energy is saved, and an operation cost is reduced.
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