CHARGED PARTICLE BEAM IRRADIATOR

摘要

PROBLEM TO BE SOLVED: To uniformly radiate a charged particle beam onto a irregularity shaped object and an object made of mixed materials. SOLUTION: This charged particle beam irradiator irradiates an object 2 with a charged particle beam 1 derived from a means 12 for generating a charged particle beam while scanning the beam 1 by a magnetic field of a scanning magnet 8. In the irradiator, a means 13 for controlling the amount of the derived charged particle beam 1 is provided and the distribution of the amount of irradiation conforming to the shape of the object 2 is obtained from the combination of the amount of the derived charged particle beam 1 and the sweep wave form of the scanning magnet 8.