发明名称 |
Heterolithic microwave integrated circuits |
摘要 |
Silicon conductive vias and pedestals are disclosed for use in microwave integrated circuits. The pedestals are isolated from a ground plane on the bottom surface by glass, while the vias are used to make electrical contact to ground. Electrical circuit elements in the top surface of the integrated circuit are selectively grounded or isolated by the choice of connection to a via or pedestal, respectively.
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申请公布号 |
US6114716(A) |
申请公布日期 |
2000.09.05 |
申请号 |
US19970845726 |
申请日期 |
1997.04.25 |
申请人 |
THE WHITAKER CORPORATION |
发明人 |
BOLES, TIMOTHY EDWARD;GOODRICH, JOEL LEE |
分类号 |
H01L21/48;H01L23/66;H01L27/06;(IPC1-7):H01L29/80;H01L31/112 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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