Contact location detecting mechanism of touch signal probe for detecting contact with workpiece using rotary motion generator for scanning stylus with phase detector providing highly accurate measurement

摘要

The configuration of a work piece is measured using a combination of a probe contact detection system and a position detector. The position detector uses measurement of phase value of a signal derived from scanning the detector probe with a rotary motion generator. A rotary motion generator (30) scans a stylus (102). A phase rotation detector (50) detects a phase value indicating a rotation position. A contact location detector (70) detects a contact location. The stylus is vibrated by a vibrator (103A) in the stylus holder. A detector (103B) detects changes in the vibrations due to surface contacts and outputs a voltage signal to the contact detector.