发明名称 PROCESSOR AND PROCESSING METHOD, AND ROBOT DEVICE
摘要 PURPOSE: A processor and processing method, and robot device are provided to reduce a size of a plurality of processing sections by using an apparatus having a plurality of processing sections arranged at up-down two stages and supplies a material from a processing section situated at one end of either one of an upper or a lower stage. CONSTITUTION: In a first processing unit(1a), a loader section(4) is arranged on a mount base(3). In a loader unit(4), a plurality of glass substrates(5) for a liquid crystal are stacked and held in place and, by a conveying mechanism, not shown, provided on the mount base (3), a glass substrates(5) for a liquid crystal are conveyed one by one from below. The glass substrate(5) for a crystal liquid conveyed from the loader(4) is sent by a first passing mechanism(6) to the second processing unit(1b). The first passing mechanism(6) has an upright support post(7). In the support post(7), a roller unit(8) is provided which is up/down drivable by a drive source not shown. The roller unit(8) has a frame(9) and pluralities of roller(11) are rotatably mounted on the frame(9) with their axes in parallel. A drive source(12) is provided on one side of the frame(9) to rotationally drive the roller(11).
申请公布号 KR20000052935(A) 申请公布日期 2000.08.25
申请号 KR19997003807 申请日期 1999.04.29
申请人 SHIBAURA MECHATRONICS CORP 发明人 MIYASAKO HISAAKI
分类号 H01L21/677;B65G49/06;B65G49/07;H01L21/00;H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/677
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