| 摘要 |
PROBLEM TO BE SOLVED: To make treatment quality of heat treatment of a substrate uniform by preliminarily heating a pilot substrate prepared independently of a substrate for lot treatment during standby time before lot treatment. SOLUTION: When a precedent lot treatment is finished, a lot treatment ending signal is inputted. A pilot substrate for exclusive use to preliminary heating which is independent of a lot treatment substrate is positioned, carried to a heating chamber, and preliminary heating is started. When a lot start signal is inputted, a first treatment substrate is carried to the heating chamber after positioning, and there heat-treated instead of the pilot substrate during preliminary heating. Thereby the temperature distribution of a member facing the substrate in the heating chamber is maintained during standby time, and treatment quality of the lot treatment can be made uniform.
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