发明名称 PROCESS SIMULATION METHOD
摘要 PROBLEM TO BE SOLVED: To realize reduction in fluctuations at the interface. SOLUTION: Displacement vectors at respective nodes on the interface are calculated, based on oxidant concentration at prescribed time intervals, and a new interface is generated based on the shift vectors. At this time, it is determined whether or not the node to be calculated moved at previous time (step 102). When the node to be calculated has moved, it is determined whether or not the nodes on both sides have moved the previous time (step 104). When one of the nodes adjacent to the node to be calculated did not moved, the unit vector direction of the displacement vector at the previous time of the node which did not moved, and the unit vector direction of the displacement vector at the present time of the node moved adjacent to the node to be calculated are combined. Then, this combined vector direction is used as the displacement vector direction of the node to be calculated.
申请公布号 JP2000232099(A) 申请公布日期 2000.08.22
申请号 JP19990031248 申请日期 1999.02.09
申请人 NEC CORP 发明人 AKIYAMA YUTAKA
分类号 H01L21/31;G06F17/50;H01L21/00;H01L21/205;H01L21/316;(IPC1-7):H01L21/31 主分类号 H01L21/31
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