MANUFACTURING METHOD OF OPTICAL WAVEGUIDE

摘要

PURPOSE: A manufacturing method of an optical waveguide is provided to prevent pollution of a photo mask and damage of an optical polymer layer, and to omit a complicated process of precisely arranging the photo mask on a part to be the core on a base film. CONSTITUTION: A manufacturing method of an optical waveguide includes following steps. A transparent base film transmitting ultra-violet rays is prepared(Step 100). A lower clad layer is formed on the transparent base panel(Step 104). A metal layer) is formed on the base film except for the area where a core will be formed(Step 102). An optical polymer layer is formed on the metal layer by coating ultra-violet hardening optical polymer to be hardened by ultra-violet rays(Step 106). The area where the metal layer is not formed is partially hardened by irradiating ultra-violet rays from under the transparent base film to the metal layer(Step 110). The area not hardened is removed on the optical polymer layer(Step 112). An upper clad layer is formed(Step 114).