| 摘要 |
PROBLEM TO BE SOLVED: To improve cooling capability for an object to be treated when the object to be treated is heated or cooled by latent heat produced at a time of phase changes in evaporation and condensation of a heat carrier with two phases of gas and liquid. SOLUTION: A tank body 1 in which an object to be treated is housed, plural jacket rooms in which a heat carrier 4 with two phases of gas and liquid is confined, a cooling mechanism 13 provided outside the jacket rooms and condensing the heat carrier 4 in a gas phase by cooling the same, and an electromagnetic induction heat generating mechanism 6 for heating the heat carrier 4 in a liquid phase are provided. The tank body 1 is cooled by evaporation latent heat produced at a time when the heat carrier 4 in the liquid phase condensed by the cooling mechanism 13 is brought into contact with the tank body 1 to evaporate. A heat-conducting part is provided for directly conducting heat of the tank body 1 to the cooling mechanism 13. Thereby the tank body 1 is cooled by the latent heat produced by the phase change of the heat carrier 4, and heat of the tank body 1 is cooled directly by conduction from the cooling mechanism 13 via the heat-conducting part.
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