发明名称 |
PRECISION ALIGNMENT AND ASSEMBLY OF MICROLENSES AND MICROCOLUMNS |
摘要 |
A method and the associated apparatus for alignment and assembly of microlenses and microcolumns in which aligning structures such as rigid fibers are used to precisely align multiple microlens components. Alignment openings are formed in the microlens components and standard optical fibers are threaded through the openings in each microlens component as they are stacked. The fibers provide sufficient stiffness and stability to the structure to precisely align the apertures of the microlens components and thereby allow for increased assembly efficiency over traditional microlens and microcolumn bonding techniques.
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申请公布号 |
WO0046831(A1) |
申请公布日期 |
2000.08.10 |
申请号 |
WO2000US03174 |
申请日期 |
2000.02.07 |
申请人 |
ETEC SYSTEMS, INC. |
发明人 |
LEE, KIM, Y.;KIM, HO-SEOB;RISHTON, STEPHEN, A.;CHANG, TAI-HON, PHILIP |
分类号 |
H01J9/14;H01J9/18;H01J37/04;H01J37/12;(IPC1-7):H01J9/18 |
主分类号 |
H01J9/14 |
代理机构 |
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地址 |
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