| 摘要 |
PURPOSE: A horizontal reactor having a gas guidance member for fabrication of compound semiconductor is to prevent high temperature of ammonia gas to be mixed with an organic metallic source supplied through the supply part. CONSTITUTION: A horizontal reactor for fabrication of compound semiconductor comprises: a susceptor(16) for supporting a substrate(14); an inner wall(10) defining a passage of reaction source gas in the longitudinal direction and having a diffusion guiding part(20) connected to a susceptor supporting part and an ammonia gas supply tube(18), the ammonia gas supply tube being connected to the diffusion guiding part; a reaction source gas supply part(24) connected to a selected portion of the inner wall; an ammonia gas heating member disposed around the ammonia gas supply tube; a susceptor heating member; and a gas guidance member(30) disposed at the upper portion of the diffusion guiding part such that the ammonia gas is guided along the longitudinal direction of the inner wall.
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