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发明名称
ETCHING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号
KR200184163(Y1)
申请公布日期
2000.08.01
申请号
KR19970040395U
申请日期
1997.12.24
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
NAM, KI WOOK
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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