| 摘要 |
PROBLEM TO BE SOLVED: To make the electric characteristics of a body to be tested testable with high accuracy without causing any defective conditions such as the adhesion of the material of the electrode pad of a body to be tested to the tip of a probe needle, the oxidation of the tip side of the probe needle. SOLUTION: The probe card 1 is provided with a substrate 2 and a probe needle 3 in a state supported by the substrate 2 extended downward from the probe card 1, and the tip of the probe needle 3 is brought into contact with an electrode pad of a body to be inspected to test the electric characteristics of the body to be tested. The probe card 1 is provided with a supply part 4 for supplying the probe needle 3 with a coating liquid so as to coat the surface of the tip side of the probe needle 3 at all times. The coating liquid is formed of a liquid which is non-conductive, is nonvolatile in test atmosphere, and does not corrode the body to be tested. At the time of test, by bringing the tip of the probe needle 3 into contact with the electrode pad of the body to be tested as coating the surface of the tip side of the probe needle 3 with the coating liquid, the electric characteristics of the body to be tested are tested.
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