| 摘要 |
<p>PURPOSE: A creep valve is provided which has plastic valve body and other component susceptible to a creep and automatically compensate a compression of the component and creep. CONSTITUTION: In order to minimize a creep, an internal creeo valve comprises a consistent connecting assembly among each valve sheet and a creep compensator which compensates an extension of a valve body and internal valve component and compensates any creep. A spring device inserted between operator part and an upper valve member arranges a hermitic resultant force on a upper valve sheet to the upper valve member. Also a common lower spring arranges a resultant force to a lower valve member. In particular, the creep valve is appropriate to an application in a semiconductor industry and a manual diaphram valve of three-way by a rotation of 1/4.</p> |
