Fine trimming of a monolayer capacitor or a monolayer capacitor network comprises using a focused laser beam for cutting network conductor lines or for locally converting electrodes into a non-conductive state

摘要

Fine trimming of a monolayer capacitor or a monolayer capacitor network uses a focused laser beam for cutting network conductor lines (2) or for locally converting the electrodes into a non-conductive state. Fine trimming of a network of monolayer capacitors, consisting of a support substrate, lower electrodes, dielectrics, upper electrodes and conductor lines, comprises directing a focused laser beam from above or from below through a transparent support substrate (1) to cut through conductor lines (2) of the network. An Independent claim is also included for fine trimming of a monolayer capacitor by locally laser heating the upper and lower capacitor electrodes (10, 8) on a transparent support substrate (1) to effect local conversion into a non-conductive state. Preferred Features: A laser transparent protective layer of SiO2, Si3N4 and/or an organic polymer is applied onto the conductor line (2) or the upper electrode.