| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-target device without increasing the size or complicating the shape of the device by providing a rotatable shield plate on the inner surface side of a cylindrical target formed by combining a plurality of targets. SOLUTION: A cylindrical target 11 comprises a backing plate 13 formed in polygonal shape, and a plurality of approximately rectangular flat targets 14 arranged on an inner surface of the backing plate. The cylindrical target 11 is provided with a plurality of shield plates 15 arranged on its inner surface side in a rotatable manner from the targets 14 keeping the specified distance therebetween. An electronic cyclotron resonance plasma sputtering device is capable of shielding a specified target by the shield plate 15, and achieves its purpose, forms a thin film which is uniform and high in purity on a substrate by appropriately controlling the rotation of the shield plate 15, and easily forms a multi-layer thin film having a steep interface or a thin film of functionally gradient material on the substrate with excellent quality.
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