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发明名称
摘要
申请公布号	JP3066895(B2)	申请公布日期	2000.07.17
申请号	JP19980351507	申请日期	1998.12.10
申请人		发明人
分类号	G02B21/26;B25H1/18;F16M7/00;F16M11/10;G02B21/24;G12B9/08;H01L21/66;(IPC1-7):G02B21/26;H01L21/027	主分类号	G02B21/26
代理机构		代理人
主权项
地址

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