| 摘要 |
PROBLEM TO BE SOLVED: To provide a producing method of a metal oxide thin film having uniform film thickness all over the length and good transmittance, water vapor barrier property and oxygen barrier property when the film is formed on a polymer film by sputtering. SOLUTION: When a metal oxide layer is formed by sputtering on a polymer film, the metal oxide film consists of at least one kind of oxide selected from silicon oxide, aluminum oxide and magnesium oxide. The partial pressure of water in the film forming atmosphere is controlled to between >=1×10-5 Torr and <=2×10-4 Torr, or the total partial pressure of water and oxygen in the film forming atmosphere is controlled to between >=1×10-5 Torr and <=2×10-4 Torr.
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