| 摘要 |
PURPOSE: A pressure sensor and a method for making the same are provided to simplify the manufacturing process by using a Pyrex glass film having a high elastic coefficient as a diaphragm of the sensor. CONSTITUTION: A pressure sensor includes a first substrate(11) and second and third substrates(14,15) stacked on the first substrate(11) and having rectangular openings(12,13), respectively. A Pyrex glass film(16) is disposed and attached between the second and third substrates(14,15). A nickel film(17) in which impurities are doped formed on a top edge of the Pyrex glass film(16) on the rectangular opening(12,13). The openings(12,13) are formed by an etching process.
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