| 摘要 |
<p>A motion sensor (100) having a sensing ring (114) and electrodes (120) formed on or in a surface region of a substrate (112), such as a silicon chip. The sensing ring (114) is supported above the substrate (112) by a number of spring members (116) extending radially from a hub (118), so that the ring (114) has an axis of rotation through the hub (118). The electrodes (120) are formed to closely surround the ring (114), with some of the electrodes (120) being adapted to induce vibration in the ring (114), while others detect angular and radial deflections of the ring (114). Finally, the spring members (116) are substantially S-shaped with substantially C-shaped first and second portions (116a,116b) having different radii of curvature. Configuring the spring members (116) to have two portions (116a,116b) of different radii of curvature substantially produces in the sensing ring (114) the elliptical vibration mode shape of an ideal ring. <IMAGE></p> |
