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发明名称
摘要
申请公布号	JP3055229(B2)	申请公布日期	2000.06.26
申请号	JP19910180049	申请日期	1991.07.22
申请人		发明人
分类号	C30B25/10;H01L21/205;H01L21/31;H01L21/312;H01L21/324;H01L21/768;H01L23/522;H01L27/10;(IPC1-7):H01L21/31	主分类号	C30B25/10
代理机构		代理人
主权项
地址

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