INTEGRATED CIRCUIT TRAY WITH FLEXURAL BEARINGS

摘要

PURPOSE: An integrated circuit tray with flexural bearings is provided for a low chip tray which independently has six degrees of freedom. CONSTITUTION: A semiconductor chip tray holding chips in individual bins that can each be independently moved with six degrees of freedom. The bins are held in the tray with a flexural bearing system. The flexural bearing system centers the chips at a nominal position and allows compliant motion of the bins. The flexural bearing system is made of four beams, with pairs joined at right angles through flexural bearing s.