DUAL-MODE CHARGED PARTICLE DETECTING APPARATUS

摘要

PURPOSE: A dual-mode charged particle detecting apparatus is provided to interpret a high energy charged particle and a low energy charged particle at the same time. CONSTITUTION: A dual-mode charged particle detecting apparatus comprises a backward scattering(BSE) detector(20) and a secondary(SE) detector(22). A front(20a) of the BSE detector(20) is directed downward to a sample(5), and a front(22a) of the SE detector(22) is directed upward to an electronic light source(2). A diffraction unit(24) is located on the SE detector(22). The BSE detector(20) collects backward scattering electrons which are emitted from the sample(5), and secondary electrons are expelled by the diffraction unit(24) so as to be directed to the SE detector(22).