| 摘要 |
PROBLEM TO BE SOLVED: To provide a TEM cell-process measuring jig for a LSI tester, capable of easily performing the work of the radiation noise evaluation and immunity evaluation of an LSI. SOLUTION: A metal frame 1 is arranged so as to surround a socket 2 provided on an evaluating substrate 5. A fitting part 1A to be fitted into an opening part 42 with the connecting surface 21 of the socket 2 connected to an LSI 3 for evaluation facing housing space 43 is formed in the metal frame 1. The upper surface 1A1 of the fitting part 1A and a wall surface 41A of a bottom wall 41 around the opening part 42 of a TEM cell 4 are constituted, in such a way as to be flush with the fitting part 1A of the metal frame 1 fitted into the opening part 42. By the contact between the part of the fitting part 1A and the opening part 42 of the TEM cell 4, a continuity state is practically maintained in a frequency band necessary for the metal frame 1 and the TEM cell 4 for evaluating the LSI 3 for evaluation.
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