| 摘要 |
PROBLEM TO BE SOLVED: To easily analyze the causes of failure and trouble of a temperature adjustment process. SOLUTION: A semiconductor wafer is placed on each of a plurality of temperature adjustment stages 23A, 23B,..., and a temperature adjustment process such as baking is executed. The controllers 31, 27A, 27B,... allow the temperature adjustment stages 23A, 23B,... to execute the temperature adjustment process repeatedly and gives the amount of operation to the temperature adjustment stages so that a stage temperature changes along a specific target temperature profile. The controller acquires such control data as the integration operation time of the temperature adjustment stages 23A, 23B,..., a process execution count, an error log for indicating the details of generated errors, a stage temperature and the amount of operation in a failed temperature adjustment process and stores the data in a memory and displays and outputs the storage information when there is a request from another user later.
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