发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor integrated circuit device that incorporates an inspection facilitating circuit that attains measurement with high precision by using an inexpensive inspection device without increasing an inspection time. SOLUTION: The semiconductor integrated circuit device incorporates a D/A converter including a plurality of reference power supply terminals 110,... a resistance division circuit 12 that applies resistance division to a voltage among the reference power supply terminals 110,... to generate an intermediate voltage, and a gradation voltage selector switch 5 that selects any of the reference power supply voltages and intermediate voltages in response to an input digital signal and outputs an output voltage of the D/A converter from its output terminal 6. Relays 13, 14 are provided to locally short-circuit part of the resistance division circuit 12. Through the configuration above, the voltage between the output voltage being an inspection object can be extended, and digital discrimination by a comparator is attained in place of the measurement by a conventional analog voltage measurement device with high precision, the inspection time can considerably be reduced and high precision inspection is attained by using the inexpensive digital inspection device.
申请公布号 JP2000165244(A) 申请公布日期 2000.06.16
申请号 JP19980337451 申请日期 1998.11.27
申请人 SHARP CORP 发明人 SAKAGUCHI HIDEAKI
分类号 H01L21/822;H01L27/04;H03M1/76;(IPC1-7):H03M1/76 主分类号 H01L21/822
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