METHOD OF MANUFACTURING THIN FILM TRANSISTOR

摘要

PURPOSE: A method of manufacturing a thin film transistor is to reduce a number of masks by a thin photo sensitive film between a source electrode and a drain electrode. CONSTITUTION: A method of manufacturing a thin film transistor comprises steps of: forming a gate lead and a gate electrode connected to the gate lead on an insulated substrate; forming a gate insulated film for covering the gate wiring; forming a semiconductor pattern on the gate insulated film; forming a resistive contact layer pattern on the semiconductor pattern; forming a data wiring including source and drain electrodes, and a data line connected to the source electrode, the source and drain electrodes being separately formed on the contact layer in flush with each other; forming a protective film pattern having a first contact hole for covering the data wiring and exposing the drain electrode; and forming a pixel electrode connected to the drain electrode through the first contact hole.