| 摘要 |
PURPOSE: A method for manufacturing a pad of an LCD(liquid crystal display) is provided to uniformly form a surface of the pad by depositing chrome on a pad side instead of an oxide layer. CONSTITUTION: A pad consists of a source/drain electrode metal(5) and a conductive material(10). A gate(2) is formed on a semiconductor substrate(1). The conductive material(10) and an oxide layer(3) is sequentially formed on the gate. In addition, a barrier metal(7) and the source/drain electrode metal(5) are sequentially deposited on the entire surface of the structure. After depositing the gate(2) on the semiconductor substrate(1), the conductive material(10) is formed on the entire surface of the gate. Then, a gate insulating layer, a semiconductor layer, and an impurity semiconductor layer are sequentially deposited. After depositing a transparent electrode, a pixel electrode is formed by performing a patterning process. A contact hole is formed in a pad area by removing a center of a protecting layer(4).
|
