METHOD FOR ARRANGING CONTACT PORTIONS

摘要

PURPOSE: A method for arranging contact portions is provided to prevent an unwanted contact hole between contact holes formed by a photoresist pattern. CONSTITUTION: Contact portions of M(M is a natural number equal or larger than 2) x N(N is a natural number equal or larger than 2) array are arranged. The contact portions are in an insulation layer which is between an upper conduction layer and a lower conduction layer. Here, a (N-1)th contact portion and a Nth contact portion are arranges as a zigzag type. Thereby, unwanted contact hole can not be generated between contact holes formed by a photoresist pattern.