A POLISHING MACHINE AND METHOD

摘要

A machine for abrading or polishing a workpiece (5) comprises a holding surface holding the workpiece, a head member (7) arranged along a rotation axis to rotate about the rotation axis, a working member (8) having a surface for abrading or polishing the workpiece (5) arranged on the head member on the rotational axis (h) for rotation about the rotation axis with the head member, a first driving arrangement for driving a head member and the working member mounted thereon to rotate about the rotation axis, a head mounting arrangement for mounting the head member, a second driving arrangement (700) for driving the head mounting arrangement to incline the rotation axis of the head member relative to a precession axis intersecting the rotation axis, and for moving the head member to inclined positions with the rotation axis precessed about the precession axis, and a third driving arrangement (800) for relatively moving the head mounting arrangement across the holding surface.