| 摘要 |
<p>A method for producing a liquid discharge head provided with an element substrate and a ceiling plate which are fixed in a mutually opposed state, plural liquid path walls provided between said ceiling plate and said element substrate and defining plural liquid paths, plural discharge energy generating elements provided in parallel manner on the surface of said element substrate so as to be respectively positioned in said plural liquid paths, and plural movable members provided on said element substrate so as to respectively oppose to said plural discharge energy generating elements and formed like a cantilever, fixed at the upstream ends in the flowing direction of the liquid in said liquid paths and having free ends at the downstream ends, the method comprising steps of forming a gap forming member in a position, on the surface provided with said discharge energy generating element of said element substrate, corresponding to a bubble generating area where a bubble is generated in the liquid by the thermal energy generated by said discharge energy generating element, forming a first material layer to constitute said movable member on said gap forming member, patterning an anti-etching protective film in the form of said movable member, forming a second material layer to constitute said liquid path walls so as to cover the upper and lateral faces of said patterned anti-etching protective film, removing a portion corresponding to said liquid path in said second material layer by etching, thereby forming said liquid path walls and said liquid path, cutting said element substrate to be plurally separated between said step of patterning said movable member and said step of forming said second material layer, and removing said gap forming member after the formation of said liquid path. <IMAGE> <IMAGE></p> |
