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发明名称
摘要
申请公布号
JP3049847(B2)
申请公布日期
2000.06.05
申请号
JP19910175390
申请日期
1991.07.16
申请人
发明人
分类号
H01L21/82;H01L21/3205;H01L23/52;(IPC1-7):H01L21/82
主分类号
H01L21/82
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代理人
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