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经营范围
发明名称
Ion implantation apparatus
摘要
申请公布号
GB2336466(B)
申请公布日期
2000.05.31
申请号
GB19990007433
申请日期
1999.03.31
申请人
* NEC CORPORATION
发明人
JUN * MIHIRA
分类号
H01J37/317;H01L21/265;H01L21/67;H01L27/00;(IPC1-7):H01J37/30
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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