| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser which is equipped with a magnetic bearing and a motor, which are prevented from corroding by a laser gas or from contaminating a laser gas. SOLUTION: An excimer laser is equipped with outer ring magnets 11 and 11, mounted on a chamber 2 and inner ring magnets 10 and 10 mounted on rotary shafts 9 located on each side of a wing part 9 are provided, magnetic bearings 12 and 12 which releasably support the rotary shafts 9 in a freely rotatable manner, a stator 47 which is mounted near the inner wall edge of the chamber 2, a rotor 48 mounted on the rotating shaft 9 facing the inner circumferential surface of the stator 47, and a motor 49 which drives an axial fan 1 directly, wherein the outer ring magnets 11 and 11, the inner ring magnets 10 and 10, the rotor 48, and the stator 47 are each housed in a space shielded from a laser gas or are all formed of a bulk material by processing, and a coating high in corrosion resistance to a laser gas is provided to the their surfaces. |
