| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the quality of electron guns by preventing defective assemblies of electron-gun constructions mounted with bead glass from flowing out to a subsequent process. SOLUTION: This device is equipped with first and second measuring parts 41, 42 having a pair of displacement sensors 45a, 45b and 46a, 46b, respectively, disposed in positions axisymmetric about an optical axis X of an electron-gun construction 51 for measuring outer diameters of the electron-gun construction 51 mounted with bead glass 55, 55. The embedded depths of electron-gun construction support pieces embedded in the bead glass can be measured by the pairs of measuring means possessed by the measuring parts, and therefore an abnormality or occurrence of defective assembly can be immediately grasped.
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