THREE-COORDINATE DISPLACEMENT DEVICE

摘要

FIELD: engineering physics; driving or actuating mechanisms for various devices such as raster microscopes. SUBSTANCE: device has control unit and electromechanical transducer made in the form of polyhedral angle piece whose external faces carry common solid electrode and internal faces carry gate electrodes, at least one on each face. Gate electrodes can be symmetrically arranged relative to apex of hexahedral angle or each electrode may be applied symmetrically relative to center line of each face crossing apex of polygonal angle. EFFECT: improved rigidity of construction and precision of positioning. 5 cl, 13 dwg